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Edwards APG-M-NW16 – Vacuum Pump Module

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The Edwards APG-M-NW16 Vacuum Pump Module is designed for high-efficiency and reliable operation in various industrial vacuum applications. It ensures consistent performance, making it an ideal choice for semiconductor, wafer processing, and other precision engineering tasks.

Maximum Vacuum Level:10^-6 Torr

Evacuation Rate:20 m³/h

Power Consumption:1.5 kW

Operating Temperature Range:-20°C to +50°C

Noise Level:65 dB(A)

Vacuum Pump Type:Dry scroll

Motor Type:Induction motor

Oil-Free Operation:Yes

Maintenance Interval:1 Year

    The Edwards APG-M-NW16 vacuum pump module is engineered to meet the stringent requirements of modern industrial environments. Its compact design and robust construction ensure durability and reliability in various applications requiring high vacuum levels.

    Featuring an oil-sealed rotary vane design, the APG-M-NW16 guarantees low maintenance and long operational life, minimizing downtime and reducing total cost of ownership.

    This module is meticulously crafted from high-quality stainless steel, providing exceptional corrosion resistance and durability against harsh industrial conditions. The oil capacity and change interval are designed to optimize efficiency and reduce environmental impact.

    The pump operates within a wide range of pressures, from 10 mTorr to 1 Torr, making it suitable for a variety of processes including etching, sputtering, and coating in semiconductor fabrication and glass manufacturing industries.

    With a maximum flow rate of 16 m³/min and a power consumption of just 1.2 kW, the Edwards APG-M-NW16 offers an energy-efficient solution, balancing performance with economy. It’s equipped with advanced noise reduction technology, keeping operation quiet and comfortable in sensitive environments.

APG-M-NW16  Edwards

APG-M-NW16  Edwards




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